JIS C 5630-1:2017
JIS C 5630-1:2017
Semiconductor Devices - Micro-electromechanical Devices - Part 1: Terms And Definitions
Japanese Standards Association
Semiconductor Devices - Micro-electromechanical Devices - Part 1: Terms And Definitions
Japanese Standards Association
| Document Type | Standard |
| Status | Current |
| Publisher | Japanese Standards Association |
| Supersedes |
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