DIN 50451-6 Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH<(Index)4>F) and in etching mixtures of high-purity ammonium fluoride solution containing hydrofluoric acid

standard by Deutsches Institut Fur Normung E.V. (German National Standard), 11/01/2014