IEC 61094-6 : 1.0

Table of Contents

FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Reference environmental conditions
5 Principle of electrostatic actuator operation
  5.1 General
  5.2 Electrostatic pressure
  5.3 Electrostatic actuator response
6 Actuator design
  6.1 General
  6.2 Design
7 Validation
  7.1 General
  7.2 Repeatability of measurements
  7.3 Uniformity of actuators of a given model
  7.4 Uniformity of the difference between actuator and pressure
      response levels
8 Measurement of electrostatic actuator response
  8.1 System for measurement of electrostatic actuator response
  8.2 Uncertainty components
9 Applications of an electrostatic actuator
  9.1 General
  9.2 Verification of the frequency response of a measurement
      system
  9.3 Determination of the environmental characteristics of
      microphone measurement systems
  9.4 Determination of free-field and pressure frequency responses
  9.5 Measurement of actuator response at very high frequencies
Annex A (informative) Examples of electrostatic actuator designs
Annex B (informative) Set-up for measuring electrostatic actuator
                      response
Annex C (informative) Typical uncertainty analysis
Annex D (informative) Difference between free-field, pressure and
                      actuator responses for typical models of
                      measurement microphones

Abstract

Provides guidelines for the design of actuators for microphones equipped with electrically conductive diaphragms; gives methods for the validation of electrostatic actuators; gives a method for determining the electrostatic actuator response of a microphone.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 29