IEC 62047-1 : 2.0

Table of Contents

FOREWORD
1 Scope
2 Terms and definitions
Annex A (informative) - Standpoint and criteria in
        editing this glossary
Annex B (informative) - Clause cross-references of
        IEC 62047-1:2005 and IEC 62047-1:2015
Bibliography

Abstract

Specifies terms for micro-electromechanical devices including the process of production of such devices.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 47