SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 3: THIN FILM STANDARD TEST PIECE FOR TENSILE TESTING
International Electrotechnical Committee
FOREWORD<br>1 Scope<br>2 Normative references<br>3 Test piece materials<br>4 Test piece fabrications<br>5 Plane shape of test piece<br>6 Test piece thickness<br>7 Gauge mark<br>8 Test<br>9 Document attached to standard test pieces<br>Annex A (informative) Test piece
Explains a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 [mu]m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
| Document Type | Standard |
| Status | Current |
| Publisher | International Electrotechnical Committee |
| Committee | TC 47 |
