SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS
International Electrotechnical Committee
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test piece
4.1 Design of test piece
4.2 Preparation of test piece
4.3 Test piece thickness
4.4 Storage prior to testing
5 Testing method and test apparatus
5.1 General
5.2 Method of gripping (mounting of test piece)
5.3 Static loading test
5.4 Method of loading
5.5 Speed of testing
5.6 Environment control
6 Endurances (test termination)
7 Test report
Annex A (informative) Technical background of this standard
Annex B (informative) Test piece
Annex C (informative) Displacement measurement
Annex D (informative) Testing environment
Annex E (informative) Number of test pieces
Bibliography
Describes the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 [mu]m and 10 [mu]m under constant force range or constant displacement range.
| Document Type | Standard |
| Status | Current |
| Publisher | International Electrotechnical Committee |
| Committee | TC 47 |
