IEC 62417 : 1.0

Table of Contents

FOREWORD<br>1 Scope<br>2 Abbreviations and letter symbols<br>3 General description<br>4 Test equipment<br>5 Test structures<br>6 Sample size<br>7 Conditions<br>8 Procedure<br>9 Criteria<br>10 Reporting

Abstract

Gives a wafer level test procedure to determine the amount of positive mobile charge in oxide layers in metal-oxide semiconductor field effect transistors.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 47