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IEC 62047-5 : 1.0

IEC 62047-5 : 1.0

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 5: RF MEMS SWITCHES

International Electrotechnical Committee

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Table of Contents

FOREWORD<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Essential ratings and characteristics<br>5 Measuring methods <br>6 Reliability (performance)<br>Annex A (informative) - General description of RF MEMS <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Switches<br>Annex B (informative) - Geometry of RF MEMS switches<br>Annex C (informative) - Packaging of RF MEMS switches <br>Annex D (informative) - Failure mechanism of RF MEMS switches<br>Annex E (informative) - Applications of RF MEMS switches<br>Annex F (informative) - Measurement procedure of RF MEMS <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;switches

Abstract

Specifies terminology, definition, symbols, test methods that can be used to evaluate and determine the essential ratings and characteristic parameters of RF MEMS switches.

General Product Information

Document Type Standard
Status Current
Publisher International Electrotechnical Committee
Committee TC 47

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