IEC 62047-5 : 1.0
IEC 62047-5 : 1.0
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 5: RF MEMS SWITCHES
International Electrotechnical Committee
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 5: RF MEMS SWITCHES
International Electrotechnical Committee
FOREWORD<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Essential ratings and characteristics<br>5 Measuring methods <br>6 Reliability (performance)<br>Annex A (informative) - General description of RF MEMS <br> Switches<br>Annex B (informative) - Geometry of RF MEMS switches<br>Annex C (informative) - Packaging of RF MEMS switches <br>Annex D (informative) - Failure mechanism of RF MEMS switches<br>Annex E (informative) - Applications of RF MEMS switches<br>Annex F (informative) - Measurement procedure of RF MEMS <br> switches
Specifies terminology, definition, symbols, test methods that can be used to evaluate and determine the essential ratings and characteristic parameters of RF MEMS switches.
Document Type | Standard |
Status | Current |
Publisher | International Electrotechnical Committee |
Committee | TC 47 |