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IEC 62047-10 : 1.0

IEC 62047-10 : 1.0

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 10: MICRO-PILLAR COMPRESSION TEST FOR MEMS MATERIALS

International Electrotechnical Committee

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Table of Contents

FOREWORD<br>1 Scope<br>2 Normative references<br>3 Symbols and designations <br>4 Test piece <br>5 Testing method and test apparatus<br>6 Test report<br>Annex A (informative) - Error estimation using finite <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;element method<br>Bibliography

Abstract

Describes micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication.

General Product Information

Document Type Standard
Status Current
Publisher International Electrotechnical Committee
Committee TC 47

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