NANOTECHNOLOGIES - DESCRIPTION, MEASUREMENT AND DIMENSIONAL QUALITY PARAMETERS OF ARTIFICIAL GRATINGS
International Electrotechnical Committee
FOREWORD<br>INTRODUCTION<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Symbols and abbreviated terms<br>5 Grating calibration and quality characterization methods<br>6 Reporting of grating characterization results<br>Annex A (informative) - Background information and examples <br>Annex B (informative) - Bravais lattices <br>Bibliography
Defines the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.
| Document Type | Standard |
| Status | Current |
| Publisher | International Electrotechnical Committee |
| Committee | TC 113 |
