SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES
International Electrotechnical Committee
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Description of trench structures in a micrometer
scale
5 Description of needle structures in a micrometer
scale
6 Measurement method
Annex A (informative) - Examples of measurement for
trench and needle structures in a micrometer
scale
Annex B (informative) - Uncertainty in dimensional
measurement
Bibliography
Defines descriptions of trench structure and needle structure in a micrometer scale.
| Document Type | Standard |
| Status | Current |
| Publisher | International Electrotechnical Committee |
| Committee | TC 47 |
