SEMICONDUCTOR DEVICES - MECHANICAL AND CLIMATIC TEST METHODS - PART 28: ELECTROSTATIC DISCHARGE (ESD) SENSITIVITY TESTING - CHARGED DEVICE MODEL (CDM) - DEVICE LEVEL
International Electrotechnical Committee
FOREWORD<br>INTRODUCTION<br>1 Scope <br>2 Normative references <br>3 Terms and definitions <br>4 Required equipment <br>5 Periodic tester qualification, waveform records,<br> and waveform verification requirements<br>6 CDM ESD testing requirements and procedures <br>7 CDM classification criteria<br>Annex A (normative) - Verification module (metal<br> disc) specifications and cleaning guidelines for<br> verification modules and testers <br>Annex B (normative) - Capacitance measurement<br> of verification modules (metal discs) sitting on<br> a tester field plate dielectric<br>Annex C (informative) - CDM test hardware and<br> metrology improvements<br>Annex D (informative) - CDM tester electrical<br> schematic<br>Annex E (informative) - Sample oscilloscope setup<br> and waveform<br>Annex F (informative) - Field-induced CDM tester<br> discharge procedures <br>Annex G (informative) - Waveform verification<br> procedures<br>Annex H (informative) - Determining the appropriate<br> charge delay for full charging of a large module<br> or device<br>Annex I (informative) - Electrostatic discharge (ESD)<br> sensitivity testing direct contact charged device<br> model (DC-CDM)<br>Bibliography
Describes the procedure for testing, evaluating, and classifying devices and microcircuits according to their susceptibility (sensitivity) to damage or degradation by exposure to a defined field-induced charged device model (CDM) electrostatic discharge (ESD).
| Document Type | Standard |
| Status | Current |
| Publisher | International Electrotechnical Committee |
| Committee | TC 47 |
