SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 30: MEASUREMENT METHODS OF ELECTRO-MECHANICAL CONVERSION CHARACTERISTICS OF MEMS PIEZOELECTRIC THIN FILM
International Electrotechnical Committee
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test bed of MEMS piezoelectric thin film
5 Thin film under testing
6 Test report
Annex A (informative) - Example of measuring method
of MEMS piezoelectric thin film
Bibliography
Describes measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices.
| Document Type | Standard |
| Status | Current |
| Publisher | International Electrotechnical Committee |
| Committee | TC 47 |
