SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 29: ELECTROMECHANICAL RELAXATION TEST METHOD FOR FREESTANDING CONDUCTIVE THIN-FILMS UNDER ROOM TEMPERATURE
International Electrotechnical Committee
FOREWORD
1 Scope
2 Normative references
3 Terms and symbols
4 Test piece
5 Test principle and test apparatus
6 Test report
Annex A (informative) - Electromechanical relaxation
test example of freestanding Au film
Describes a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature.
| Document Type | Standard |
| Status | Current |
| Publisher | International Electrotechnical Committee |
| Committee | TC 47 |
