IEC 62047-32:2019

Semiconductor devices – Micro-electromechanical devices – Part 32: Test method for the nonlinear vibration of MEMS resonators

International Electrotechnical Committee

Abstract

This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators.

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 47

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