JIS R 1636:1998
JIS R 1636:1998
Test method for thickness of fine ceramic thin films - Film thickness by contact probe profilometer
Japanese Standards Association
Test method for thickness of fine ceramic thin films - Film thickness by contact probe profilometer
Japanese Standards Association
This Japanese Industrial Standard specifies the test method for thickness of fine ceramic thin films by a contact probe profilometer. The applicable range of the film thickness shall be 10 nm to 10000 nm.
Document Type | Standard |
Status | Current |
Publisher | Japanese Standards Association |