JIS R 1637:1998
JIS R 1637:1998
Test method for resistivity of conductive fine ceramic thin films with a four-point probe array
Japanese Standards Association
Test method for resistivity of conductive fine ceramic thin films with a four-point probe array
Japanese Standards Association
This Japanese Industrial Standard specifies the test method for resistivity of the conductive fine ceramic thin films with a four-point array. The applicable range of the resistivity shall be 1*10-5 ohm cm, and film thickness shall be maximum 500 mum.
Document Type | Standard |
Status | Current |
Publisher | Japanese Standards Association |